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Engineering

Engin­eer­ing cus­tom­ized coat­ing sys­tems is just as much a core competence for FHR as deriv­ing sys­tem plat­forms or imple­ment­ing them in serial sys­tems. Depos­ition of func­tional coat­ings under vacuum is what unites our systems.

Our Ambition

Our ambition is to make new research and development find­ings available for indus­trial applications. We take this path along with our customers, starting with the development of layer stacks and continuing on past pilot sys­tems and finally scaling up to an industrial level.

We combine our knowledge of process technologies, mechanical design, software development and automation. Our specialty is to design customized coating systems in a way that they can be used to produce competitive products (cost of ownership).

Process Engineering

We have developed process engineering expertise for a variety of technologies. The result is stable, production-ready processes.

We are not satisfied until our customers produce functional coatings of the quality they want.

  • Reactive and non-reactive magnetron sputtering
  • Thermal evaporation
  • CVD and PECVD for highly efficient deposition of metals, oxides and nitrides
  • Atomic Layer Deposition (ALD) for deposition of ultra-thin functional coatings with a uniform film thickness on complex 3D surfaces
  • Plasma-enhanced etching technologies for surface treatment and ultra-efficient material removal (high-rate etching).

Materials

Mater­ial ex­per­tise is cru­cial for depos­ition of per­fect functional coat­ings on a wide vari­ety of sub­strates. We are not only sup­ply­ing the coat­ing systems, but also the con­sum­ables needed.

Sput­ter­ing targets are developed and manufactured in-house by experts who know how the com­pos­i­tion and grain structure of the start­ing mater­ial will affect the quality of our customers' final products.